Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
TOWARDS INERTIAL GRADE VIBRATORY MICROGYROS: A HIGH-Q IN-PLANE SILICON-ON-INSULATOR TUNING FORK DEVICE
 

Summary: TOWARDS INERTIAL GRADE VIBRATORY MICROGYROS:
A HIGH-Q IN-PLANE SILICON-ON-INSULATOR TUNING FORK DEVICE
Mohammad Zaman, Ajit Sharma, Babak Amini, and Farrokh Ayazi
School of Electrical and Computer Engineering, Georgia Institute of Technology
Atlanta, GA 30332-0250
ABSTRACT
This paper reports on the design and implementation of an
in-plane solid-mass single-crystal silicon tuning fork gyro that
has potential to achieve inertial-grade performance. A novel
design is devised to achieve high Q in the drive and sense
resonant modes (Qdrive=84,000 and Qsense=64,000) with effective
decoupling. The gyroscope was fabricated on 40Ám SOI using a
two-mask process. The drive and sense resonant modes were
matched electronically to within 0.07% of each other and the
measured rate results show a sensitivity of 1.25mV/║/s in a
bandwidth of 12Hz.
MOTIVATION
MEMS vibratory gyros have yet to achieve inertial grade
performance, i.e., rate resolution and bias stability better than
0.1║/h. To achieve this, a vibratory gyroscope must attain very

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering