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Linnik Simulator Introduction.
 

Summary: Linnik Simulator
Introduction.
Linnik is an interferometer which designed and patented by KLA-
Tencor Corporation and used in Optical Overlay Metrology Tools.
Proposal.
The aim is a building of the Linnik Simulator for fringes calculation
and system calibration. The simulator will help to investigate a
impacts of different factors on performance of the Linnik system.
Computing.
The simulator will be created by using Matlab7 on WinXP platform.
The Simulator must have a convenient graphical interface.
By using parameters of the optical system the simulator will calculate
fringes.
List of parameters: NA, upper and bottom boundaries of the light
source spectrum, the type of light intensity distribution and parameter
OPD describing the deviation of beam splitter from its designed
position.
The results of project will be presented in a web page.
Development.
For fringes calculation we will use the next formula:

  

Source: Adler, Joan - Physics Department, Technion, Israel Institute of Technology

 

Collections: Physics