Summary: Linear, nonlinear and mixed-regime analysis of electrostatic MEMS
, N.R. Aluru*,2
Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA
Electrostatically actuated microstructures can undergo large deformations for certain geometric con®gurations and applied voltages. The
use of linear theories in such cases can produce inaccurate results. By selecting a range of geometric parameters (such as beam lengths,
thicknesses and gaps), we identify the regimes, where linear theories become inaccurate and necessitate the use of nonlinear theories. In
cases where linear theories produce inaccurate results, we propose a mixed-regime approach to combine linear and nonlinear theories. We
show that a mixed-regime approach can be more ef®cient compared to a full nonlinear simulation of the electrostatically actuated structure.
This paper also proposes the use of meshless techniques for ef®cient simulation of linear and nonlinear behavior in electrostatic MEMS.
# 2001 Elsevier Science B.V. All rights reserved.
Keywords: Electrostatic MEMS; Linear and nonlinear theories; Meshless method; Mixed-regime approach
Accurate analysis of electrostatic microelectromechani-
cal systems (MEMS) [1,2] and the development of reliable
reduced-order models (or macro-models) [3,4] for rapid
system level analysis requires proper understanding and
characterization of the nonlinearity in electrostatic devices.
The use of linear theories instead of nonlinear theories can