Summary: Sub-micron grating fabrication on hafnium
oxide thin-film waveguides with focused ion-
Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, and Gregory W. Auner
Department of Electrical and Computer Engineering, Wayne State University, Detroit, MI-48202.
Department of Space Research, University of Michigan, Ann Arbor, MI-48109.
Abstract: Uniform period sub-micron gratings have been fabricated using
focused ion beam milling on hafnium oxide waveguides. Atomic force
microscopy indicates that the gratings have smooth and uniform profiles. At
the period of 330 nm, the largest peak-to-peak height that was achieved was
85 nm. Scattering at the grating imperfections was found to be at least two
orders of magnitude weaker than the intensity of the diffracted order.
©2006 Optical Society of America
OCIS codes: (050.1950) Diffraction gratings; (130.3120) Integrated optics devices.
References and links
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