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20 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 1, FEBRUARY 2008 A Low-Cost 128 128 Uncooled Infrared
 

Summary: 20 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 1, FEBRUARY 2008
A Low-Cost 128 128 Uncooled Infrared
Detector Array in CMOS Process
Selim Eminoglu, Member, IEEE, Mahmud Yusuf Tanrikulu, Member, IEEE, and Tayfun Akin, Member, IEEE
Abstract--This paper discusses the implementation of a low-cost
128 128 uncooled infrared microbolometer detector array to-
gether with its integrated readout circuit (ROC) using a standard
0.35 m n-well CMOS and post-CMOS MEMS processes. The
detector array can be created with simple bulk-micromachining
processes after the CMOS fabrication, without the need for any
complicated lithography or deposition steps. The array detectors
are based on suspended p+
-active/n-well diode microbolometers
with a pixel size of 40 m 40 m and a fill factor of 44%. The
p+
-active/n-well diode detector has a measured dc responsivity
( ) of 4970 V/W and a thermal time constant of 36 ms at
50 mtorr vacuum level. The total measured rms noise of the diode
type detector is 0.69 V for an 8 kHz bandwidth, resulting in a de-
tectivity (D

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering