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MODELING OF DIELECTRIC CHARGING IN RF MEMS CAPACITIVE SWITCHES
 

Summary: MODELING OF DIELECTRIC CHARGING
IN RF MEMS CAPACITIVE SWITCHES
Prasad S. Sumant,1
Andreas C. Cangellaris,2
and
Narayana R. Aluru1
1
Department of Mechanical Science and Engineering, University of
Illinois, 1206 W. Green St., Urbana, IL 61801; Corresponding author:
psumant2@uiuc.edu
2
Department of Electrical and Computer Engineering, University of
Illinois, 1406 W. Green St., Urbana, IL 61801
Received 10 May 2007
ABSTRACT: A unified, macroscopic, one-dimensional model is pre-
sented for the quantitative description of the process of dielectric charg-
ing in RF MEMS capacitive switches. The model provides for the direct
incorporation of various physical factors known to impact dielectric
charging, such as surface roughness, material inhomogeneity, and elec-
tric field-dependent conduction in the dielectric. The values of the vari-

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science