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TRANSDUCERS '01 EUROSENSORS XV 456 The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10 14, 2001
 

Summary: TRANSDUCERS '01 EUROSENSORS XV 456
The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10 14, 2001
A SYMMETRIC SURFACE MICROMACHINED GYROSCOPE
WITH DECOUPLED OSCILLATION MODES
Said Emre Alper* and Tayfun Akin*,
**
*Middle East Technical University, Dept. of Electrical and Electronics Eng.,
Ankara, Turkey. said@metu.edu.tr
**TUBITAK-ODTU-BILTEN, Middle East Technical University,
Ankara, Turkey. tayfun-akin@metu.edu.tr
SUMMARY
This paper reports a new symmetric gyroscope
structure that allows not only matched resonant
frequencies for the drive and sense vibration modes for
better resolution, but also decoupled drive and sense
oscillation modes for preventing unstable operation
due to mechanical coupling. The symmetry and
decoupling features are achieved at the same time with
a new suspension beam design. The gyroscope
structure is designed using a standard three-layer

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering