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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 13, NO. 6, DECEMBER 2004 1043 VHF Single-Crystal Silicon Elliptic Bulk-Mode
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 13, NO. 6, DECEMBER 2004 1043
VHF Single-Crystal Silicon Elliptic Bulk-Mode
Capacitive Disk Resonators--Part I:
Design and Modeling
Zhili Hao, Member, ASME, Siavash Pourkamali, Student Member, IEEE, and Farrokh Ayazi, Member, IEEE
Abstract--This paper, the first of two parts, presents the design
and modeling of VHF single-crystal silicon (SCS) capacitive
disk resonators operating in their elliptical bulk resonant mode.
The disk resonators are modeled as circular thin-plates with
free edge. A comprehensive derivation of the mode shapes and
resonant frequencies of the in-plane vibrations of the disk struc-
tures is described using the two-dimensional (2-D) elastic theory.
An equivalent mechanical model is extracted from the elliptic
bulk-mode shape to predict the dynamic behavior of the disk
resonators. Based on the mechanical model, the electromechanical
coupling and equivalent electrical circuit parameters of the disk
resonators are derived. Several considerations regarding the
operation, performance, and temperature coefficient of frequency
of these devices are further discussed. This model is verified in
part II of this paper, which describes the implementation and

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering