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Tunable Piezoelectric MEMS Resonators for Real-Time Clock

Summary: Tunable Piezoelectric MEMS Resonators
for Real-Time Clock
Diego Emilio Serrano, Roozbeh Tabrizian and Farrokh Ayazi
School of Electrical and Computer Engineering
Georgia Institute of Technology
Atlanta, GA USA
diego.serrano@ece.gatech.edu; roozbeh.tabrizian@ece.gatech.edu; ayazi@ece.gatech.edu
Abstract--This paper reports on the design, simulation and
characterization of small form factor, tunable piezoelectric
MEMS resonators for real time clock applications (32.768 kHz).
The structures were fabricated on a thin-film AlN-on-SOI
substrate to enable piezoelectric actuation of an out-of-plane
flexural mode, as well as electrostatic frequency tuning by
utilizing the handle layer as a DC voltage electrode. Resonators
of only a few hundred of m in size exhibit greater than 3100
ppm of tuning using voltages no larger than 4 V; this tuning
sufficiently compensates for frequency variations across
temperature from -25 to 100 C. The devices exhibit low
motional impedance that is completely independent of the tuning


Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology


Collections: Engineering