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Summary: 1 Copyright © 2010 by ASME
Proceedings of the ASME 2010 International Design Engineering Technical Conferences &
Computers and Information in Engineering Conference
IDETC/CIE 2010
August 15-18, 2010, Montreal, Quebec, Canada
DETC2010-28185
DESIGN OF A LARGE RANGE XY NANOPOSITIONING SYSTEM
Shorya Awtar* and Gaurav Parmar
Precision Systems Design Laboratory
Mechanical Engineering, University of Michigan
Ann Arbor MI 48109
ABSTRACT
Achieving large motion range (> 1 mm) along with
nanometric motion quality (< 10 nm), simultaneously, has been
a key challenge in nanopositioning systems. Practical
limitations associated with the individual physical components
(flexure bearing, actuators, and sensors) and their integration,
particularly in the case of multi-axis systems, have restricted
the range of current nanopositioning systems to about 100 m.
This paper presents a novel physical system layout, with a
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