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2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim p s scurrent topics in solid state physics
 

Summary: © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
p s scurrent topics in solid state physics
c
status
solidi
www.pss-c.com
physica
Phys. Status Solidi C 7, No. 1, 116­119 (2010) / DOI 10.1002/pssc.200982613
Resonant MEMS based on cubic
GaN layers
F. Niebelschütz*,1
, K. Brueckner2
, W. Jatal1
, E. Tschumak3
, D. J. As3
, M. A. Hein2
, and J. Pezoldt**,1
1
Department of Nanotechnology, Institute of Micro- and Nanotechnologies, Ilmenau University of Technology,
P.O. Box 100565, 98684 Ilmenau, Germany

  

Source: As, Donat Josef - Department Physik, Universität Paderborn

 

Collections: Materials Science; Physics