Summary: EE6504: Nanoscale Engineering
Nanofabrication Techniques-I
Associate Professor Adekunle Adeyeye
Dept. of Electrical & Computer Engineering
National University of Singapore
E-mail: eleaao@nus.edu.sg
Office:E4-08-08
©Adekunle Adeyeye 2009/2010
Why Nanotechnology ?
Technology: The ongoing drive toward miniaturization
of electronic components
New Physics: Our ability to controllably fabricate, manipulate
and examine structures at nanoscale has lead to the
observation of novel physical phenomena.
Nanofabrication Techniques
©Adekunle Adeyeye 2009/2010
Photolithographic process in
simple terms is akin to a
camera taking a photograph.
In photography a

Source: Adeyeye, Adekunle - Department of Electrical and Computer Engineering, National University of Singapore

Collections: Physics; Materials Science