Production of superconducting Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub x/ thin films by d. c. diode sputtering and annealing
Thin films of Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub x/ have been produced on sapphire substrates by d.c. diode sputtering in Ar atmosphere followed by annealing O/sub 2/ at 850 C. X-ray diffraction and resistivity show the films are amorphous and insulating as sputtered but become polycrystalline and conductive upon annealing, whereupon resistance begins to fall at 98 K, becoming fully superconductive at 69 K with a mid-point at 86 K. Four-point resistance measurements are made using low frequency phase sensitive detection. Electron microprobe analysis indicates that the 1-2-3 composition of this oxide can be obtained in the film by using a Y/sub 1/Ba/sub 3.2/Cu/sub 3.9/O/sub x/ target, suggesting that resputtering of Ba and Cu occurs during the deposition. A strong interaction (most likely diffusive) can occur with the sapphire substrate which degrades the superconducting transition, necessitating shorter annealing times and lower temperatures than used for bulk powders.
- Research Organization:
- IBM Almaden Research Center, San Jose, California, 95120
- OSTI ID:
- 6910872
- Report Number(s):
- CONF-871178-; TRN: 88-030184
- Journal Information:
- AIP Conf. Proc.; (United States), Vol. 165:1; Conference: Thin film processing and characterization of high temperature superconductors, Anaheim, CA, USA, 6 Nov 1987
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
BARIUM COMPOUNDS
CHEMICAL COMPOSITION
COUPLING
ELECTRIC CONDUCTIVITY
SPUTTERING
X-RAY DIFFRACTION
COPPER OXIDES
SAPPHIRE
SORPTIVE PROPERTIES
SUPERCONDUCTING FILMS
YTTRIUM COMPOUNDS
ANNEALING
ARGON
DC SYSTEMS
DIFFUSION
ELECTRON PROBES
OXYGEN
POLYCRYSTALS
THERMIONIC DIODES
VERY HIGH TEMPERATURE
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
CORUNDUM
CRYSTALS
DIFFRACTION
DIODE TUBES
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELEMENTS
ENERGY SYSTEMS
FILMS
FLUIDS
GASES
HEAT TREATMENTS
MINERALS
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POWER SYSTEMS
PROBES
RARE GASES
SCATTERING
SURFACE PROPERTIES
THERMIONIC TUBES
TRANSITION ELEMENT COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies