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A transparent conducting oxide (TCO) film comprising: a TCO layer, and dopants selected from the elements consisting of Vanadium, Molybdenum, Tantalum, Niobium, Antimony, Titanium, Zirconium, and Hafnium, wherein the elements are n-type dopants; and wherein the transparent conducting oxide is characterized by an improved electron mobility of about 42 cm.sup.2/V-sec while simultaneously maintaining a high carrier density of .about.4.4e.times.10.sup.20 cm.sup.-3.
High quality transparent conducting oxide thin films
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Gessert, Timothy A.
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Duenow, Joel N.
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Barnes, Teresa
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Coutts, Timothy J.
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08/28/2012 |
8,253,012 |
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