Bibliographic Citation
| 7,529,016 | |
| Extended-range tiltable micromirror | |
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| 05/05/2009 | |
| US patent application 11/494,223 | |
| Allen, James J. (Albuquerque, NM); Wiens, Gloria J. (Newberry, FL); Bronson, Jessica R. (Gainesville, FL) | |
| Sandia National Laboratories (SNL-NM), Albuquerque, NM | |
| United States Department of Energy | |
| AC04-94AL85000 | |
| Allen, James J. (Albuquerque, NM); Wiens, Gloria J. (Newberry, FL); Bronson, Jessica R. (Gainesville, FL) | |
| A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior. | |
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