Bibliographic Citation
| 8,205,497 | |
| Microelectromechanical inertial sensor Loading...
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| 06/26/2012 | |
| US patentn application 12/398,559 | |
| Okandan, Murat (Edgewood, NM); Nielson, Gregory N. (Albuquerque, NM) | |
| Sandia National Laboratories | |
| USDOE | |
| AC04-94AL85000 | |
| Sandia Corporation (Albuquerque, NM) | |
| A microelectromechanical (MEM) inertial sensor is disclosed which can be used to sense a linear acceleration, or a Coriolis acceleration due to an angular rotation rate, or both. The MEM inertial sensor has a proof mass which is supported on a bridge extending across an opening through a substrate, with the proof mass being balanced on the bridge by a pivot, or suspended from the bridge by the pivot. The proof mass can be oscillated in a tangential direction in the plane of the substrate, with any out-of-plane movement of the proof mass in response to a sensed acceleration being optically detected using transmission gratings located about an outer edge of the proof mass to generate a diffracted light pattern which changes with the out-of-plane movement of the proof mass. | |
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