Bibliographic Citation
| 8,187,678 | |
| Ultra-thin microporous/hybrid materials Loading...
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| 05/29/2012 | |
| US patent application 12/271,719 | |
| Jiang, Ying-Bing (Albuquerque, NM); Cecchi, Joseph L. (Albuquerque, NM); Brinker, C. Jeffrey (Albuquerque, NM) | |
| University of New Mexico | |
| USDOE | |
| FG02-02ER15368 | |
| STC.UNM (Albuquerque, NM) | |
| Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes. | |
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