Polymer-assisted deposition of films
Abstract
A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
- Inventors:
-
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 985156
- Patent Number(s):
- 7365118
- Application Number:
- US Patent Application 10/616,479
- Assignee:
- Los Alamos National Security, LLC (Los Alamos, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Polymer-assisted deposition of films. United States: N. p., 2008.
Web.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, & Lin, Yuan. Polymer-assisted deposition of films. United States.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Tue .
"Polymer-assisted deposition of films". United States. https://www.osti.gov/servlets/purl/985156.
@article{osti_985156,
title = {Polymer-assisted deposition of films},
author = {McCleskey, Thomas M and Burrell, Anthony K and Jia, Quanxi and Lin, Yuan},
abstractNote = {A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 29 00:00:00 EDT 2008},
month = {Tue Apr 29 00:00:00 EDT 2008}
}
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Works referenced in this record:
Chemical Solution Deposition of Perovskite Thin Films
journal, November 1997
- Schwartz, Robert W.
- Chemistry of Materials, Vol. 9, Issue 11
Chemical Solution Routes to Single-Crystal Thin Films
journal, August 1996
- Lange, F. F.
- Science, Vol. 273, Issue 5277