MIS-based sensors with hydrogen selectivity
Abstract
The invention provides hydrogen selective metal-insulator-semiconductor sensors which include a layer of hydrogen selective material. The hydrogen selective material can be polyimide layer having a thickness between 200 and 800 nm. Suitable polyimide materials include reaction products of benzophenone tetracarboxylic dianhydride 4,4-oxydianiline m-phenylene diamine and other structurally similar materials.
- Inventors:
-
- Boulder, CO
- Livermore, CA
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 970537
- Patent Number(s):
- 7340938
- Application Number:
- 11/361,310
- Assignee:
- The Regents of the University of Colorado (Boulder, CO)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Li, Dongmei, Medlin, J. William, McDaniel, Anthony H., and Bastasz, Robert J. MIS-based sensors with hydrogen selectivity. United States: N. p., 2008.
Web.
Li, Dongmei, Medlin, J. William, McDaniel, Anthony H., & Bastasz, Robert J. MIS-based sensors with hydrogen selectivity. United States.
Li, Dongmei, Medlin, J. William, McDaniel, Anthony H., and Bastasz, Robert J. Tue .
"MIS-based sensors with hydrogen selectivity". United States. https://www.osti.gov/servlets/purl/970537.
@article{osti_970537,
title = {MIS-based sensors with hydrogen selectivity},
author = {Li, Dongmei and Medlin, J. William and McDaniel, Anthony H. and Bastasz, Robert J.},
abstractNote = {The invention provides hydrogen selective metal-insulator-semiconductor sensors which include a layer of hydrogen selective material. The hydrogen selective material can be polyimide layer having a thickness between 200 and 800 nm. Suitable polyimide materials include reaction products of benzophenone tetracarboxylic dianhydride 4,4-oxydianiline m-phenylene diamine and other structurally similar materials.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 11 00:00:00 EDT 2008},
month = {Tue Mar 11 00:00:00 EDT 2008}
}
Works referenced in this record:
Ultrathin, Gas-Selective Polyimide Membranes Prepared from Multilayer Polyelectrolyte Films
journal, January 2003
- Sullivan, D. M.; Bruening, M. L.
- Chemistry of Materials, Vol. 15, Issue 1
Real time measurements of hydrogen desorption and absorption during CO exposures of Pd: hydrogen sticking and dissolution
journal, May 1998
- Eriksson, M.; Ekedahl, L. -G
- Applied Surface Science, Vol. 133, Issue 1-2
Surface Heterogeneity of Supported Palladium Catalyst for the Hydrogenation of Acetylene−Ethylene Mixtures †
journal, March 1997
- Borodziński, Andrzej; Gołȩbiowski, Andrzej
- Langmuir, Vol. 13, Issue 5
Preparation and characterization of SiO2 composite membrane for purification of hydrogen from methanol steam reforming as an energy carrier system for PEMFC
journal, July 2003
- Lee, Dong-Wook; Lee, Yoon-Gyu; Nam, Seong-Eun
- Separation and Purification Technology, Vol. 32, Issue 1-3
Ethylene adsorption on Pd( 111 ) studied using infrared reflection–absorption spectroscopy
journal, June 2002
- Stacchiola, D.; Burkholder, L.; Tysoe, W. T.
- Surface Science, Vol. 511, Issue 1-3
Preparation and Characterizaton of SiO 2 Composite Membranes for Purification of Hydrogen for PEMFC
journal, July 2002
- Lee, Dong-Wook; Sea, Bongkuk; Lee, Kwan-Young
- Industrial & Engineering Chemistry Research, Vol. 41, Issue 15
Theoretical Study of the Adsorption of Acetylene on the (111) Surfaces of Pd, Pt, Ni, and Rh
journal, January 2003
- Medlin, J. Will; Allendorf, Mark D.
- The Journal of Physical Chemistry B, Vol. 107, Issue 1
Thin oxide films as surface modifiers of MIS field effect gas sensors
journal, June 2002
- Åbom, A. Elisabeth; Comini, Elisabetta; Sberveglieri, Giorgio
- Sensors and Actuators B: Chemical, Vol. 85, Issue 1-2
Palladium and platinum gate metal‐oxide‐semiconductor capacitors in hydrogen and oxygen mixtures
journal, October 1982
- Armgarth, M.; Söderberg, D.; Lundström, I.
- Applied Physics Letters, Vol. 41, Issue 7
Synthesis, Characterization, and Optical Properties of Metal-Containing Fluorinated Polyimide Films
journal, November 1998
- Sawada, Takashi; Ando, Shinji
- Chemistry of Materials, Vol. 10, Issue 11
The response of palladium metal-insulator-semiconductor devices to hydrogen–oxygen mixtures: comparisons between kinetic models and experiment
journal, November 2003
- Medlin, J. Will; Lutz, Andrew E.; Bastasz, Robert
- Sensors and Actuators B: Chemical, Vol. 96, Issue 1-2
Membrane-based gas separation
journal, August 1993
- Koros, W. J.; Fleming, G. K.
- Journal of Membrane Science, Vol. 83, Issue 1, p. 1-80
Structure/permeability relationships of polyimide membranes. Applications to the separation of gas mixtures
journal, August 1989
- Stern, S. A.; Mi, Y.; Yamamoto, H.
- Journal of Polymer Science Part B: Polymer Physics, Vol. 27, Issue 9
Dehydrogenation of acetylene and ethylene studied on clean and oxygen covered palladium surfaces
journal, August 1986
- Dannetun, H.; Lundström, I.; Petersson, L. -G.
- Surface Science, Vol. 173, Issue 1
The influence of CO on the response of hydrogen sensitive Pd-MOS devices
journal, August 1997
- Eriksson, M.; Ekedahl, L. -G.
- Sensors and Actuators B: Chemical, Vol. 42, Issue 3
Density functional theory studies of the adsorption of ethylene and oxygen on Pt(111) and Pt[sub 3]Sn(111)
journal, January 2001
- Watwe, Ramchandra M.; Cortright, Randy D.; Mavrikakis, Manos
- The Journal of Chemical Physics, Vol. 114, Issue 10
Gas permeability and permselectivity of photochemically crosslinked copolyimides
journal, July 1999
- Liu, Ye; Pan, Caiyuan; Ding, Mengxiang
- Journal of Applied Polymer Science, Vol. 73, Issue 4, p. 521-526
Why bother about gas-sensitive field-effect devices?
journal, August 1996
- Lundström, Ingemar
- Sensors and Actuators A: Physical, Vol. 56, Issue 1-2
Hydrogen sensing in vacuum systems with catalytic field plate MNOS capacitors
journal, May 1997
- Hughes, R. C.; Bastasz, R.; Ellis, W. P.
- Applied Surface Science, Vol. 115, Issue 1
Drift effects in transition metal gate MOS and MISFETs
journal, August 1993
- Robins, Ian
- Sensors and Actuators B: Chemical, Vol. 15, Issue 1-3
Bridging the pressure gap for palladium metal-insulator-semiconductor hydrogen sensors in oxygen containing environments
journal, July 1998
- Johansson, M.; Lundström, I.; Ekedahl, L. -G.
- Journal of Applied Physics, Vol. 84, Issue 1
Ordered structures of CO on Pd(111) studied by STM
journal, June 2002
- Rose, M. K.; Mitsui, T.; Dunphy, J.
- Surface Science, Vol. 512, Issue 1-2
Hydrogen sensitive mos-structures
journal, January 1981
- Lundström, Ingemar
- Sensors and Actuators, Vol. 1
High-Pressure Studies of CO Adsorption on Pd(111) by X-ray Photoelectron Spectroscopy and Sum-Frequency Generation
journal, April 2003
- Kaichev, Vasiliy V.; Prosvirin, Igor P.; Bukhtiyarov, Valerii I.
- The Journal of Physical Chemistry B, Vol. 107, Issue 15
Effects of a polyimide coating on the hydrogen selectivity of MIS sensors
journal, May 2006
- Li, Dongmei; McDaniel, A. H.; Bastasz, R.
- Sensors and Actuators B: Chemical, Vol. 115, Issue 1
Permeability and permselectivity of gases in fluorinated and non-fluorinated polyimides
journal, January 1992
- Tanaka, Kazuhiro; Kita, Hidetoshi; Okano, Masaaki
- Polymer, Vol. 33, Issue 3
Some studies of molecularly-imprinted polymer membranes in combination with field-effect devices
journal, June 1993
- Hedborg, Eva; Winquist, Fredrik; Lundström, Ingemar
- Sensors and Actuators A: Physical, Vol. 37-38
Interfacial reactions in polyimide/metal systems
journal, April 1991
- Iacona, Fabio; Garilli, Marco; Marletta, Giovanni
- Journal of Materials Research, Vol. 6, Issue 4
Effect of methyl substituents on permeability and permselectivity of gases in polyimides prepared from methyl-substituted phenylenediamines
journal, July 1992
- Tanaka, Kazuhiro; Okano, Masaaki; Toshino, Hiroyuki
- Journal of Polymer Science Part B: Polymer Physics, Vol. 30, Issue 8
Application of polymer-coated metal-insulator-semiconductor sensors for the detection of dissolved hydrogen
journal, June 2006
- Li, Dongmei; Medlin, J. W.; Bastasz, R.
- Applied Physics Letters, Vol. 88, Issue 23
Selective isomerization of 2,5-dihydrofuran to 2,3-dihydrofuran using CO-modified, supported Pd catalysts
journal, March 2000
- Monnier, John R.; Medlin, James W.; Kuo, Y. -J
- Applied Catalysis A: General, Vol. 194-195
Effects of competitive carbon monoxide adsorption on the hydrogen response of metal–insulator–semiconductor sensors: the role of metal film morphology
journal, February 2003
- Will Medlin, J.; McDaniel, Anthony H.; Allendorf, Mark D.
- Journal of Applied Physics, Vol. 93, Issue 4
Hydrogen sensitive mos-structures part 2: characterization
journal, January 1981
- Lundström, Ingemar; Söderberg, Dennis
- Sensors and Actuators, Vol. 2
Polymer membranes for modification of the selectivity of field-effect gas sensors
journal, March 1992
- Hedborg, Eva; Spetz, Anita; Winquist, Fredrik
- Sensors and Actuators B: Chemical, Vol. 7, Issue 1-3
Fabrication of Polymer/Selective-Flake Nanocomposite Membranes and Their Use in Gas Separation
journal, October 2004
- Jeong, Hae-Kwon; Krych, Wojtek; Ramanan, Harikrishnan
- Chemistry of Materials, Vol. 16, Issue 20
Gas permeability and permselectivity in polyimides based on 3,3',4,4'-biphenyltetracarboxylic dianhydride
journal, November 1989
- Tanaka, K.; Kita, H.; Okamoto, K.
- Journal of Membrane Science, Vol. 47, Issue 1-2