Chemical preconcentrator with integral thermal flow sensor
Abstract
A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.
- Inventors:
-
- Albuquerque, NM
- Cedar Crest, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 875083
- Patent Number(s):
- 6527835
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01F - MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- chemical; preconcentrator; integral; thermal; flow; sensor; accurately; measure; fluid; rate; microanalytical; operated; constant; temperature; power; mode; variants; fabricated; mems; technology; microanlaytical; heat; capacity; low-loss; size; fast; efficient; battery-powered; portable; systems; fluid flow; flow rate; flow sensor; /96/55/73/
Citation Formats
Manginell, Ronald P, and Frye-Mason, Gregory C. Chemical preconcentrator with integral thermal flow sensor. United States: N. p., 2003.
Web.
Manginell, Ronald P, & Frye-Mason, Gregory C. Chemical preconcentrator with integral thermal flow sensor. United States.
Manginell, Ronald P, and Frye-Mason, Gregory C. Wed .
"Chemical preconcentrator with integral thermal flow sensor". United States. https://www.osti.gov/servlets/purl/875083.
@article{osti_875083,
title = {Chemical preconcentrator with integral thermal flow sensor},
author = {Manginell, Ronald P and Frye-Mason, Gregory C},
abstractNote = {A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 2003},
month = {Wed Jan 01 00:00:00 EST 2003}
}
Works referenced in this record:
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A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
journal, June 1993
- Moser, David; Baltes, Henry
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