Electrode configuration for extreme-UV electrical discharge source
Abstract
It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation. The electric discharge plasma source includes: (a) a body that defines a circular capillary bore that has a proximal end and a distal end; (b) a back electrode positioned around and adjacent to the distal end of the capillary bore wherein the back electrode has a channel that is in communication with the distal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is concave, and a third region which is convex wherein the regions are viewed outwardly from the inner surface of the channel that is adjacent the distal end of the capillary bore so that the first region is closest to the distal end; (c) a front electrode positioned around and adjacent to the proximal end of the capillary bore wherein the frontmore »
- Inventors:
-
- Pleasanton, CA
- Tracey, CA
- San Ramon, CA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874964
- Patent Number(s):
- 6498832
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- electrode; configuration; extreme-uv; electrical; discharge; source; demonstrated; debris; generation; electric; capillary; generating; extreme; ultraviolet; soft; x-ray; dependent; magnitude; profile; field; established; surfaces; electrodes; shape; results; uniform; strength; surface; developed; minimize; sputtering; plasma; defines; circular; bore; proximal; distal; positioned; adjacent; channel; communication; defined; non-uniform; inner; exhibits; region; convex; concave; third; regions; viewed; outwardly; closest; front; substantially; linear; potential; connected; electric field; extreme ultraviolet; discharge plasma; electrode configuration; /378/250/372/
Citation Formats
Spence, Paul Andrew, Fornaciari, Neal Robert, and Chang, Jim Jihchyun. Electrode configuration for extreme-UV electrical discharge source. United States: N. p., 2002.
Web.
Spence, Paul Andrew, Fornaciari, Neal Robert, & Chang, Jim Jihchyun. Electrode configuration for extreme-UV electrical discharge source. United States.
Spence, Paul Andrew, Fornaciari, Neal Robert, and Chang, Jim Jihchyun. Tue .
"Electrode configuration for extreme-UV electrical discharge source". United States. https://www.osti.gov/servlets/purl/874964.
@article{osti_874964,
title = {Electrode configuration for extreme-UV electrical discharge source},
author = {Spence, Paul Andrew and Fornaciari, Neal Robert and Chang, Jim Jihchyun},
abstractNote = {It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation. The electric discharge plasma source includes: (a) a body that defines a circular capillary bore that has a proximal end and a distal end; (b) a back electrode positioned around and adjacent to the distal end of the capillary bore wherein the back electrode has a channel that is in communication with the distal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is concave, and a third region which is convex wherein the regions are viewed outwardly from the inner surface of the channel that is adjacent the distal end of the capillary bore so that the first region is closest to the distal end; (c) a front electrode positioned around and adjacent to the proximal end of the capillary bore wherein the front electrode has an opening that is communication with the proximal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is substantially linear, and third region which is convex wherein the regions are viewed outwardly from the inner surface of the opening that is adjacent the proximal end of the capillary bore so that the first region is closest to the proximal end; and (d) a source of electric potential that is connected across the front and back electrodes.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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