Formation of nanometer-size wires using infiltration into latent nuclear tracks
Abstract
Nanometer-size wires having a cross-sectional dimension of less than 8 nm with controllable lengths and diameters are produced by infiltrating latent nuclear or ion tracks formed in trackable materials with atomic species. The trackable materials and atomic species are essentially insoluble in each other, thus the wires are formed by thermally driven, self-assembly of the atomic species during annealing, or re-crystallization, of the damage in the latent tracks. Unlike conventional ion track lithography, the inventive method does not require etching of the latent tracks.
- Inventors:
-
- Danville, CA
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 874701
- Patent Number(s):
- 6444256
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- formation; nanometer-size; wires; infiltration; latent; nuclear; tracks; cross-sectional; dimension; nm; controllable; lengths; diameters; produced; infiltrating; formed; trackable; materials; atomic; species; essentially; insoluble; thermally; driven; self-assembly; annealing; re-crystallization; damage; unlike; conventional; track; lithography; inventive; method; require; etching; inventive method; /427/216/
Citation Formats
Musket, Ronald G, and Felter, Thomas E. Formation of nanometer-size wires using infiltration into latent nuclear tracks. United States: N. p., 2002.
Web.
Musket, Ronald G, & Felter, Thomas E. Formation of nanometer-size wires using infiltration into latent nuclear tracks. United States.
Musket, Ronald G, and Felter, Thomas E. Tue .
"Formation of nanometer-size wires using infiltration into latent nuclear tracks". United States. https://www.osti.gov/servlets/purl/874701.
@article{osti_874701,
title = {Formation of nanometer-size wires using infiltration into latent nuclear tracks},
author = {Musket, Ronald G and Felter, Thomas E},
abstractNote = {Nanometer-size wires having a cross-sectional dimension of less than 8 nm with controllable lengths and diameters are produced by infiltrating latent nuclear or ion tracks formed in trackable materials with atomic species. The trackable materials and atomic species are essentially insoluble in each other, thus the wires are formed by thermally driven, self-assembly of the atomic species during annealing, or re-crystallization, of the damage in the latent tracks. Unlike conventional ion track lithography, the inventive method does not require etching of the latent tracks.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}
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Works referenced in this record:
Fabrication of 80 Å metal wires
journal, March 1984
- Williams, W. D.; Giordano, N.
- Review of Scientific Instruments, Vol. 55, Issue 3