Liquid zone seal
Abstract
A seal assembly that provides a means for establishing multiple pressure zones within a system. The seal assembly combines a plate extending from the inner wall of a housing or inner enclosure that intersects with and is immersed in the fluid contained in a well formed in a tray contained within the enclosure. The fluid is a low vapor pressure oil, chemically inert and oxidation resistant. The use of a fluid as the sealing component provides a seal that is self-healing and mechanically robust not subject to normal mechanical wear, breakage, and formation of cracks or pinholes and decouples external mechanical vibrations from internal structural members.
- Inventors:
-
- Dublin, CA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873947
- Patent Number(s):
- 6279601
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- liquid; zone; seal; assembly; provides; means; establishing; multiple; pressure; zones; combines; plate; extending; inner; wall; housing; enclosure; intersects; immersed; fluid; contained; formed; tray; vapor; oil; chemically; inert; oxidation; resistant; sealing; component; self-healing; mechanically; robust; subject; normal; mechanical; wear; breakage; formation; cracks; pinholes; decouples; external; vibrations; internal; structural; chemically inert; seal assembly; inner wall; vapor pressure; oxidation resistant; plate extending; fluid contained; mechanically robust; external mechanical; inner enclosure; component provide; /137/355/
Citation Formats
Klebanoff, Leonard E. Liquid zone seal. United States: N. p., 2001.
Web.
Klebanoff, Leonard E. Liquid zone seal. United States.
Klebanoff, Leonard E. Mon .
"Liquid zone seal". United States. https://www.osti.gov/servlets/purl/873947.
@article{osti_873947,
title = {Liquid zone seal},
author = {Klebanoff, Leonard E},
abstractNote = {A seal assembly that provides a means for establishing multiple pressure zones within a system. The seal assembly combines a plate extending from the inner wall of a housing or inner enclosure that intersects with and is immersed in the fluid contained in a well formed in a tray contained within the enclosure. The fluid is a low vapor pressure oil, chemically inert and oxidation resistant. The use of a fluid as the sealing component provides a seal that is self-healing and mechanically robust not subject to normal mechanical wear, breakage, and formation of cracks or pinholes and decouples external mechanical vibrations from internal structural members.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
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