High efficiency replicated x-ray optics and fabrication method
Abstract
Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.
- Inventors:
-
- (Palo Alto, CA)
- Oakland, CA
- Fremont, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 873946
- Patent Number(s):
- 6278764
- Assignee:
- Regents of Unviersity of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- efficiency; replicated; x-ray; optics; fabrication; method; fabricated; sputter; deposition; reflecting; layers; super-polished; reusable; mandrel; strengthened; supporting; multilayer; results; stronger; stress-relieved; surfaces; deform; separation; enhances; ability; replica; degradation; surface; roughness; comparable; smoothness; outer; layer; electrodeposited; deposited; directly; facilitate; removal; layered; tubular; optic; device; deformation; inner; shell; single; grazing; reflection; mirror; resonant; resulting; wide; variety; applications; including; lithography; microscopy; radiography; tomography; crystallography; x-ray optics; fabrication method; sputter deposition; reflecting surfaces; single layer; outer layer; reflecting surface; wide variety; surface roughness; multilayer mirror; facilitate removal; replicated x-ray; reflecting layers; optic device; sputter deposit; reflecting layer; deposited directly; /378/
Citation Formats
Barbee, Jr., Troy W., Lane, Stephen M, and Hoffman, Donald E. High efficiency replicated x-ray optics and fabrication method. United States: N. p., 2001.
Web.
Barbee, Jr., Troy W., Lane, Stephen M, & Hoffman, Donald E. High efficiency replicated x-ray optics and fabrication method. United States.
Barbee, Jr., Troy W., Lane, Stephen M, and Hoffman, Donald E. Mon .
"High efficiency replicated x-ray optics and fabrication method". United States. https://www.osti.gov/servlets/purl/873946.
@article{osti_873946,
title = {High efficiency replicated x-ray optics and fabrication method},
author = {Barbee, Jr., Troy W. and Lane, Stephen M and Hoffman, Donald E},
abstractNote = {Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Multilayer option for conical foil x-ray mirrors
conference, July 1997
- Serlemitsos, Peter J.; Ogasaka, Yasushi; Soong, Yang
- Optical Science, Engineering and Instrumentation '97, SPIE Proceedings
Grazing incidence and multilayer x-ray optical systems
conference, July 1997
- Ulmer, Melville P.; Altkorn, Robert I.; Krieger, Allen S.
- Optical Science, Engineering and Instrumentation '97, SPIE Proceedings
Electroform replication used for multiple x-ray mirror production
journal, January 1984
- Ulmer, Melville P.; Purcell, William R.; Loughlin, Jane E. A.
- Applied Optics, Vol. 23, Issue 23
Design and fabrication of low-cost X-ray mirrors
journal, October 1996
- Ahmad, A.; Engelhaupt, D.; Feng, C.
- Optics & Laser Technology, Vol. 28, Issue 7