Module bay with directed flow
Abstract
A module bay requires less cleanroom airflow. A shaped gas inlet passage can allow cleanroom air into the module bay with flow velocity preferentially directed toward contaminant rich portions of a processing module in the module bay. Preferential gas flow direction can more efficiently purge contaminants from appropriate portions of the module bay, allowing a reduced cleanroom air flow rate for contaminant removal. A shelf extending from an air inlet slit in one wall of a module bay can direct air flowing therethrough toward contaminant-rich portions of the module bay, such as a junction between a lid and base of a processing module.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873576
- Patent Number(s):
- 6193601
- Application Number:
- 09/190048
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- module; bay; directed; flow; requires; cleanroom; airflow; shaped; gas; inlet; passage; allow; air; velocity; preferentially; contaminant; rich; portions; processing; preferential; direction; efficiently; purge; contaminants; appropriate; allowing; reduced; rate; removal; shelf; extending; slit; wall; direct; flowing; therethrough; contaminant-rich; junction; lid; base; air flowing; module bay; cleanroom air; contaminant removal; flow direction; gas inlet; gas flow; flow rate; air flow; air inlet; flow velocity; flowing therethrough; inlet passage; shaped gas; reduced cleanroom; processing module; directed flow; /454/55/
Citation Formats
Torczynski, John R. Module bay with directed flow. United States: N. p., 2001.
Web.
Torczynski, John R. Module bay with directed flow. United States.
Torczynski, John R. Tue .
"Module bay with directed flow". United States. https://www.osti.gov/servlets/purl/873576.
@article{osti_873576,
title = {Module bay with directed flow},
author = {Torczynski, John R},
abstractNote = {A module bay requires less cleanroom airflow. A shaped gas inlet passage can allow cleanroom air into the module bay with flow velocity preferentially directed toward contaminant rich portions of a processing module in the module bay. Preferential gas flow direction can more efficiently purge contaminants from appropriate portions of the module bay, allowing a reduced cleanroom air flow rate for contaminant removal. A shelf extending from an air inlet slit in one wall of a module bay can direct air flowing therethrough toward contaminant-rich portions of the module bay, such as a junction between a lid and base of a processing module.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 27 00:00:00 EST 2001},
month = {Tue Feb 27 00:00:00 EST 2001}
}
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