Dual-domain point diffraction interferometer
Abstract
A hybrid spatial/temporal-domain point diffraction interferometer (referred to as the dual-domain PS/PDI) that is capable of suppressing the scattered-reference-light noise that hinders the conventional PS/PDI is provided. The dual-domain PS/PDI combines the separate noise-suppression capabilities of the widely-used phase-shifting and Fourier-transform fringe pattern analysis methods. The dual-domain PS/PDI relies on both a more restrictive implementation of the image plane PS/PDI mask and a new analysis method to be applied to the interferograms generated and recorded by the modified PS/PDI. The more restrictive PS/PDI mask guarantees the elimination of spatial-frequency crosstalk between the signal and the scattered-light noise arising from scattered-reference-light interfering with the test beam. The new dual-domain analysis method is then used to eliminate scattered-light noise arising from both the scattered-reference-light interfering with the test beam and the scattered-reference-light interfering with the "true" pinhole-diffracted reference light. The dual-domain analysis method has also been demonstrated to provide performance enhancement when using the non-optimized standard PS/PDI design. The dual-domain PS/PDI is essentially a three-tiered filtering system composed of lowpass spatial-filtering the test-beam electric field using the more restrictive PS/PDI mask, bandpass spatial-filtering the individual interferogram irradiance frames making up the phase-shifting series, and bandpass temporal-filtering the phase-shifting series as a whole.
- Inventors:
-
- 5239 Miles Ave., Apt. A, Oakland, CA 94618
- 1195 Keeler Ave., Berkeley, CA 94708
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 873147
- Patent Number(s):
- 6100978
- Assignee:
- Naulleau, Patrick P. (5239 Miles Ave., Apt. A, Oakland, CA 94618);Goldberg, Kenneth Alan (1195 Keeler Ave., Berkeley, CA 94708)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- dual-domain; diffraction; interferometer; hybrid; spatial; temporal-domain; referred; pdi; capable; suppressing; scattered-reference-light; noise; hinders; conventional; provided; combines; separate; noise-suppression; capabilities; widely-used; phase-shifting; fourier-transform; fringe; pattern; analysis; methods; relies; restrictive; implementation; image; plane; mask; method; applied; interferograms; generated; recorded; modified; guarantees; elimination; spatial-frequency; crosstalk; signal; scattered-light; arising; interfering; beam; eliminate; true; pinhole-diffracted; reference; light; demonstrated; provide; performance; enhancement; non-optimized; standard; design; essentially; three-tiered; filtering; composed; lowpass; spatial-filtering; test-beam; electric; field; bandpass; individual; interferogram; irradiance; frames; series; temporal-filtering; analysis methods; image plane; diffraction interferometer; electric field; fringe pattern; analysis method; reference light; performance enhancement; pdi mask; scattered-reference-light noise; hybrid spatial; /356/
Citation Formats
Naulleau, Patrick P, and Goldberg, Kenneth Alan. Dual-domain point diffraction interferometer. United States: N. p., 2000.
Web.
Naulleau, Patrick P, & Goldberg, Kenneth Alan. Dual-domain point diffraction interferometer. United States.
Naulleau, Patrick P, and Goldberg, Kenneth Alan. Sat .
"Dual-domain point diffraction interferometer". United States. https://www.osti.gov/servlets/purl/873147.
@article{osti_873147,
title = {Dual-domain point diffraction interferometer},
author = {Naulleau, Patrick P and Goldberg, Kenneth Alan},
abstractNote = {A hybrid spatial/temporal-domain point diffraction interferometer (referred to as the dual-domain PS/PDI) that is capable of suppressing the scattered-reference-light noise that hinders the conventional PS/PDI is provided. The dual-domain PS/PDI combines the separate noise-suppression capabilities of the widely-used phase-shifting and Fourier-transform fringe pattern analysis methods. The dual-domain PS/PDI relies on both a more restrictive implementation of the image plane PS/PDI mask and a new analysis method to be applied to the interferograms generated and recorded by the modified PS/PDI. The more restrictive PS/PDI mask guarantees the elimination of spatial-frequency crosstalk between the signal and the scattered-light noise arising from scattered-reference-light interfering with the test beam. The new dual-domain analysis method is then used to eliminate scattered-light noise arising from both the scattered-reference-light interfering with the test beam and the scattered-reference-light interfering with the "true" pinhole-diffracted reference light. The dual-domain analysis method has also been demonstrated to provide performance enhancement when using the non-optimized standard PS/PDI design. The dual-domain PS/PDI is essentially a three-tiered filtering system composed of lowpass spatial-filtering the test-beam electric field using the more restrictive PS/PDI mask, bandpass spatial-filtering the individual interferogram irradiance frames making up the phase-shifting series, and bandpass temporal-filtering the phase-shifting series as a whole.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}