Compton backscattered collimated x-ray source
Abstract
A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.
- Inventors:
-
- Woodside, CA
- Stanford, CA
- Issue Date:
- Research Org.:
- SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
- OSTI Identifier:
- 871925
- Patent Number(s):
- 5825847
- Assignee:
- Board of Trustees of Leland Stanford Junior University (Palo Alto, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE
- DOE Contract Number:
- AC03-76SF00515
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- compton; backscattered; collimated; x-ray; source; high-intensity; inexpensive; applications; lithography; disclosed; intense; pulse; power; laser; stored; high-finesse; resonator; repetitively; collides; nearly; head-on; backscatters; bunched; electron; beam; relatively; energy; circulating; compact; storage; beams; tightly; focused; matched; interaction; region; inside; optical; laser-electron; rise; x-rays; desired; wavelength; cools; stabilizes; electrons; intrabeam; scattering; coulomb; repulsion; cooling; provides; bunch; suitable; particular; sufficient; amount; generated; device; excellent; flexible; cbx; throughput; compton backscattered; desired wavelength; x-ray lithography; sufficient amount; x-ray source; electron beam; electron beams; power laser; region inside; bunched electron; collimated x-ray; scattered x-ray; coulomb repulsion; interaction region; high-finesse resonator; intense pulse; desired wave; /378/
Citation Formats
Ruth, Ronald D, and Huang, Zhirong. Compton backscattered collimated x-ray source. United States: N. p., 1998.
Web.
Ruth, Ronald D, & Huang, Zhirong. Compton backscattered collimated x-ray source. United States.
Ruth, Ronald D, and Huang, Zhirong. Thu .
"Compton backscattered collimated x-ray source". United States. https://www.osti.gov/servlets/purl/871925.
@article{osti_871925,
title = {Compton backscattered collimated x-ray source},
author = {Ruth, Ronald D and Huang, Zhirong},
abstractNote = {A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 1998},
month = {Thu Jan 01 00:00:00 EST 1998}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Tunable, short pulse hard x‐rays from a compact laser synchrotron source
journal, December 1992
- Sprangle, P.; Ting, A.; Esarey, E.
- Journal of Applied Physics, Vol. 72, Issue 11
New x‐ray source for lithography
journal, December 1989
- Sprangle, P.; Hafizi, B.; Mako, F.
- Applied Physics Letters, Vol. 55, Issue 24
Laser Cooling of Electron Beams for Linear Colliders
journal, June 1997
- Telnov, Valery
- Physical Review Letters, Vol. 78, Issue 25
Development of a compact high brightness X-ray source
journal, March 1994
- Chen, J.; Imasaki, K.; Fujita, M.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 341, Issue 1-3
Emerging terawatt picosecond CO/sub 2/ laser technology and possible applications in accelerator physics
conference, January 1998
- Pogorelsky, I. V.; Ben-Zvi, I.
- Proceedings of the 1997 Particle Accelerator Conference (Cat. No.97CH36167)