Apparatus for precision micromachining with lasers
Abstract
A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialogroaphic sections of machined parts show little (submicron scale) recast layer and heat affected zone.
- Inventors:
-
- Dublin, CA
- Danville, CA
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 871509
- Patent Number(s):
- 5744780
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; precision; micromachining; lasers; material; processing; short-pulsed; high-repetition-rate; visible; laser; utilizes; near; diffraction; limited; high-speed; two-axis; tilt-mirror; steering; beam; optical; focusing; imaging; holder; consist; cover; plate; useful; drilling; cutting; milling; polishing; metals; ceramics; broad; application; manufacturing; components; machining; demonstrated; percussion; trepanning; 30; copper; vapor; running; multi-khz; pulse; repetition; frequency; straight; parallel; holes; size; varying; 500; microns; 25; aspect; ratios; 40; consistently; drilled; surface; finish; variety; micromilling; microdrilling; 250; results; materialogroaphic; sections; machined; submicron; scale; recast; layer; heat; affected; zone; surface finish; material processing; precision machining; affected zone; broad application; visible laser; copper vapor; pulse repetition; vapor laser; aspect ratio; laser beam; cover plate; repetition frequency; diffraction limited; processing apparatus; aspect ratios; precision components; parallel holes; heat affected; near diffraction; speed precision; precision micromachining; /219/
Citation Formats
Chang, Jim J, Dragon, Ernest P, and Warner, Bruce E. Apparatus for precision micromachining with lasers. United States: N. p., 1998.
Web.
Chang, Jim J, Dragon, Ernest P, & Warner, Bruce E. Apparatus for precision micromachining with lasers. United States.
Chang, Jim J, Dragon, Ernest P, and Warner, Bruce E. Tue .
"Apparatus for precision micromachining with lasers". United States. https://www.osti.gov/servlets/purl/871509.
@article{osti_871509,
title = {Apparatus for precision micromachining with lasers},
author = {Chang, Jim J and Dragon, Ernest P and Warner, Bruce E},
abstractNote = {A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialogroaphic sections of machined parts show little (submicron scale) recast layer and heat affected zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 28 00:00:00 EDT 1998},
month = {Tue Apr 28 00:00:00 EDT 1998}
}
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