Unitaxial constant velocity microactuator
Abstract
A uniaxial drive system or microactuator capable of operating in an ultra-high vacuum environment. The mechanism includes a flexible coupling having a bore therethrough, and two clamp/pusher assemblies mounted in axial ends of the coupling. The clamp/pusher assemblies are energized by voltage-operated piezoelectrics therewithin to operatively engage the shaft and coupling causing the shaft to move along its rotational axis through the bore. The microactuator is capable of repeatably positioning to sub-manometer accuracy while affording a scan range in excess of 5 centimeters. Moreover, the microactuator generates smooth, constant velocity motion profiles while producing a drive thrust of greater than 10 pounds. The system is remotely controlled and piezoelectrically driven, hence minimal thermal loading, vibrational excitation, or outgassing is introduced to the operating environment.
- Inventors:
-
- Knoxville, TN
- Issue Date:
- Research Org.:
- National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States)
- OSTI Identifier:
- 869343
- Patent Number(s):
- 5319257
- Assignee:
- Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AI05-81OR20806
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- unitaxial; constant; velocity; microactuator; uniaxial; drive; capable; operating; ultra-high; vacuum; environment; mechanism; flexible; coupling; bore; therethrough; clamp; pusher; assemblies; mounted; axial; energized; voltage-operated; piezoelectrics; therewithin; operatively; engage; shaft; causing; move; rotational; axis; repeatably; positioning; sub-manometer; accuracy; affording; scan; range; excess; centimeters; moreover; generates; smooth; motion; profiles; producing; thrust; 10; pounds; remotely; controlled; piezoelectrically; driven; hence; minimal; thermal; loading; vibrational; excitation; outgassing; introduced; rotational axis; operating environment; bore therethrough; remotely controlled; vacuum environment; ultra-high vacuum; minimal thermal; thermal loading; thermal load; constant velocity; flexible coupling; remotely control; electrically driven; /310/
Citation Formats
McIntyre, Timothy J. Unitaxial constant velocity microactuator. United States: N. p., 1994.
Web.
McIntyre, Timothy J. Unitaxial constant velocity microactuator. United States.
McIntyre, Timothy J. Sat .
"Unitaxial constant velocity microactuator". United States. https://www.osti.gov/servlets/purl/869343.
@article{osti_869343,
title = {Unitaxial constant velocity microactuator},
author = {McIntyre, Timothy J},
abstractNote = {A uniaxial drive system or microactuator capable of operating in an ultra-high vacuum environment. The mechanism includes a flexible coupling having a bore therethrough, and two clamp/pusher assemblies mounted in axial ends of the coupling. The clamp/pusher assemblies are energized by voltage-operated piezoelectrics therewithin to operatively engage the shaft and coupling causing the shaft to move along its rotational axis through the bore. The microactuator is capable of repeatably positioning to sub-manometer accuracy while affording a scan range in excess of 5 centimeters. Moreover, the microactuator generates smooth, constant velocity motion profiles while producing a drive thrust of greater than 10 pounds. The system is remotely controlled and piezoelectrically driven, hence minimal thermal loading, vibrational excitation, or outgassing is introduced to the operating environment.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1994},
month = {Sat Jan 01 00:00:00 EST 1994}
}