Aerosol chemical vapor deposition of metal oxide films

Ott, Kevin C; Kodas, Toivo T

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Title: Aerosol chemical vapor deposition of metal oxide films

Abstract

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. Thismore » « less

Inventors:

Ott, Kevin C ^[1]; Kodas, Toivo T ^[2]

4745 Trinity Dr., Los Alamos, NM 87544
5200 Noreen Dr. NE., Albuquerque, NM 87111

Issue Date:: Sat Jan 01 00:00:00 EST 1994

Research Org.:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

OSTI Identifier:: 869121

Patent Number(s):: 5278138

Assignee:: Ott, Kevin C. (4745 Trinity Dr., Los Alamos, NM 87544);Kodas, Toivo T. (5200 Noreen Dr. NE., Albuquerque, NM 87111)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/408 - {of copper or solid solutions thereof}
C23C16/4486 - {by producing an aerosol and subsequent evaporation of the droplets or particles}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S427/101 - Liquid Source Chemical Depostion, i.e. LSCVD or Aerosol Chemical Vapor Deposition, i.e. ACVD
Y10S505/734 - From organometallic precursors, e.g. acetylacetonates
Y10S505/737 - From inorganic salt precursors, e.g. nitrates
Y10S505/742 - Annealing

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DOE Contract Number:: W-7405-ENG-36

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: aerosol; chemical; vapor; deposition; metal; oxide; films; process; preparing; film; multicomponent; including; forming; solution; comprised; suitable; solvent; precursor; compounds; capable; volatilizing; temperatures; decomposition; temperature; passing; combination; oxygen-containing; carrier; gas; heated; zone; sufficient; evaporate; volatilize; volatilized; surface; substrate; decompose; whereby; atoms; contained; deposited; disclosed; addition; coated; article; comprising; conforming; selected; consisting; silicon; magnesium; yttrium-stabilized; zirconium; sapphire; lanthanum; gallate; characterized; substantially; uniform; thickness; field; relates; coating; techniques; particularly; result; contract; department; energy; w-7405-eng-36; solution comprised; compounds capable; metal atom; article comprising; oxide films; suitable solvent; uniform thickness; chemical vapor; carrier gas; metal oxide; vapor deposition; substantially uniform; temperature sufficient; magnesium oxide; oxide film; zirconium oxide; deposition techniques; film coating; decomposition temperature; metal atoms; precursor compounds; suitable oxygen; stabilized zirconium; heated zone; sufficient temperature; deposition technique; coated article; precursor compound; substrate selected; oxide including; /505/427/

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                    Ott, Kevin C, and Kodas, Toivo T. Aerosol chemical vapor deposition of metal oxide films.  United States: N. p., 1994. 
        Web.

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                    Ott, Kevin C, & Kodas, Toivo T. Aerosol chemical vapor deposition of metal oxide films.  United States.

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                    Ott, Kevin C, and Kodas, Toivo T. Sat .  
        "Aerosol chemical vapor deposition of metal oxide films".  United States.  https://www.osti.gov/servlets/purl/869121.

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@article{osti_869121,

  title        = {Aerosol chemical vapor deposition of metal oxide films},

  author       = {Ott, Kevin C and Kodas, Toivo T},

  abstractNote = {A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Sat Jan 01 00:00:00 EST 1994},

  month        = {Sat Jan 01 00:00:00 EST 1994}

}

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Works referenced in this record:

Bismuth strontium calcium copper oxide high-Tc superconducting films from nitrate precursors
journal, August 1988

Cooper, Emanuel I.; Giess, Edward A.; Gupta, Arunava
Materials Letters, Vol. 7, Issue 1-2
https://doi.org/10.1016/0167-577X(88)90069-9

Formation of Y-Ba-Cu-O Superconducting Film by a Spray Pyrolysis Method
journal, October 1987

Kawai, Maki; Kawai, Tomoji; Masuhira, Hiromi
Japanese Journal of Applied Physics, Vol. 26, Issue Part 2, No. 10
https://doi.org/10.1143/JJAP.26.L1740

Synthesis of small particle size YBa2Cu3O7−x by a vapor phase process
journal, September 1988

Pebler, A.; Charles, R. G.
Materials Research Bulletin, Vol. 23, Issue 9
https://doi.org/10.1016/0025-5408(88)90122-5

Preparation and characterization of copper(II) oxide thin films grown by a novel spray pyrolysis method
journal, June 1989

DeSisto, W.; Sosnowski, M.; Smith, F.
Materials Research Bulletin, Vol. 24, Issue 6
https://doi.org/10.1016/0025-5408(89)90093-7

High Tc superconducting films prepared by pyrolysis of an ultrasonic-generated aerosol
journal, May 1989

Langlet, M.; Senet, E.; Deschanvres, J. L.
Journal of the Less Common Metals, Vol. 151
https://doi.org/10.1016/0022-5088(89)90345-7

Generation of thick Ba ₂ YCu ₃ O ₇ films by aerosol deposition
journal, May 1989

Kodas, T. T.; Engler, E. M.; Lee, V. Y.
Applied Physics Letters, Vol. 54, Issue 19
https://doi.org/10.1063/1.101497

Chemical vapor deposition of the superconducting YBa ₂ Cu ₃ O _{7− x} phase using halides as metal sources
journal, June 1989

Ottosson, M.; Andersson, T.; Carlsson, J. ‐O.
Applied Physics Letters, Vol. 54, Issue 24
https://doi.org/10.1063/1.101540

Aerosol flow reactor production of fine Y ₁ Ba ₂ Cu ₃ O ₇ powder: Fabrication of superconducting ceramics
journal, May 1988

Kodas, T. T.; Engler, E. M.; Lee, V. Y.
Applied Physics Letters, Vol. 52, Issue 19
https://doi.org/10.1063/1.99703

Epitaxial growth of high T _c superconducting Y‐Ba‐Cu‐O thin films on (001)MgO by a chemical spray pyrolysis method
journal, September 1988

Chu, J. J.; Liu, R. S.; Kung, J. H.
Journal of Applied Physics, Vol. 64, Issue 5
https://doi.org/10.1063/1.342497

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A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metalmore » « less
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Similar Records

Title: Aerosol chemical vapor deposition of metal oxide films

Abstract

Citation Formats

Bismuth strontium calcium copper oxide high-Tc superconducting films from nitrate precursors journal, August 1988

Formation of Y-Ba-Cu-O Superconducting Film by a Spray Pyrolysis Method journal, October 1987

Synthesis of small particle size YBa2Cu3O7−x by a vapor phase process journal, September 1988

Preparation and characterization of copper(II) oxide thin films grown by a novel spray pyrolysis method journal, June 1989

High Tc superconducting films prepared by pyrolysis of an ultrasonic-generated aerosol journal, May 1989

Generation of thick Ba 2 YCu 3 O 7 films by aerosol deposition journal, May 1989

Chemical vapor deposition of the superconducting YBa 2 Cu 3 O 7− x phase using halides as metal sources journal, June 1989

Aerosol flow reactor production of fine Y 1 Ba 2 Cu 3 O 7 powder: Fabrication of superconducting ceramics journal, May 1988

Epitaxial growth of high T c superconducting Y‐Ba‐Cu‐O thin films on (001)MgO by a chemical spray pyrolysis method journal, September 1988

Bismuth strontium calcium copper oxide high-Tc superconducting films from nitrate precursors
journal, August 1988

Formation of Y-Ba-Cu-O Superconducting Film by a Spray Pyrolysis Method
journal, October 1987

Synthesis of small particle size YBa2Cu3O7−x by a vapor phase process
journal, September 1988

Preparation and characterization of copper(II) oxide thin films grown by a novel spray pyrolysis method
journal, June 1989

High Tc superconducting films prepared by pyrolysis of an ultrasonic-generated aerosol
journal, May 1989

Generation of thick Ba ₂ YCu ₃ O ₇ films by aerosol deposition
journal, May 1989

Chemical vapor deposition of the superconducting YBa ₂ Cu ₃ O _{7− x} phase using halides as metal sources
journal, June 1989

Aerosol flow reactor production of fine Y ₁ Ba ₂ Cu ₃ O ₇ powder: Fabrication of superconducting ceramics
journal, May 1988

Epitaxial growth of high T _c superconducting Y‐Ba‐Cu‐O thin films on (001)MgO by a chemical spray pyrolysis method
journal, September 1988