Ionization chamber dosimeter
Abstract
A method for fabricating an ion chamber dosimeter collecting array of the type utilizing plural discrete elements formed on a uniform collecting surface which includes forming a thin insulating layer over an aperture in a frame having surfaces, forming a predetermined pattern of through holes in the layer, plating both surfaces of the layer and simultaneously tilting and rotating the frame for uniform plate-through of the holes between surfaces. Aligned masking and patterned etching of the surfaces provides interconnects between the through holes and copper leads provided to external circuitry.
- Inventors:
-
- Berkeley, CA
- Kensington, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 868046
- Patent Number(s):
- 5061216
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- ionization; chamber; dosimeter; method; fabricating; collecting; array; type; utilizing; plural; discrete; elements; formed; uniform; surface; forming; insulating; layer; aperture; frame; surfaces; predetermined; pattern; holes; plating; simultaneously; tilting; rotating; plate-through; aligned; masking; patterned; etching; provides; interconnects; copper; leads; provided; external; circuitry; external circuit; insulating layer; ionization chamber; predetermined pattern; elements formed; external circuitry; chamber dosimeter; collecting surface; type utilizing; /445/427/
Citation Formats
Renner, Tim R, Nyman, Mark A, and Stradtner, Ronald. Ionization chamber dosimeter. United States: N. p., 1991.
Web.
Renner, Tim R, Nyman, Mark A, & Stradtner, Ronald. Ionization chamber dosimeter. United States.
Renner, Tim R, Nyman, Mark A, and Stradtner, Ronald. Tue .
"Ionization chamber dosimeter". United States. https://www.osti.gov/servlets/purl/868046.
@article{osti_868046,
title = {Ionization chamber dosimeter},
author = {Renner, Tim R and Nyman, Mark A and Stradtner, Ronald},
abstractNote = {A method for fabricating an ion chamber dosimeter collecting array of the type utilizing plural discrete elements formed on a uniform collecting surface which includes forming a thin insulating layer over an aperture in a frame having surfaces, forming a predetermined pattern of through holes in the layer, plating both surfaces of the layer and simultaneously tilting and rotating the frame for uniform plate-through of the holes between surfaces. Aligned masking and patterned etching of the surfaces provides interconnects between the through holes and copper leads provided to external circuitry.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 1991},
month = {Tue Jan 01 00:00:00 EST 1991}
}
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