Surface profiling interferometer
Abstract
The design of a long-trace surface profiler for the non-contact measurement of surface profile, slope error and curvature on cylindrical synchrotron radiation (SR) mirrors. The optical system is based upon the concept of a pencil-beam interferometer with an inherent large depth-of-field. The key feature of the optical system is the zero-path-difference beam splitter, which separates the laser beam into two colinear, variable-separation probe beams. A linear array detector is used to record the interference fringe in the image, and analysis of the fringe location as a function of scan position allows one to reconstruct the surface profile. The optical head is mounted on an air bearing slide with the capability to measure long aspheric optics, typical of those encountered in SR applications. A novel feature of the optical system is the use of a transverse "outrigger" beam which provides information on the relative alignment of the scan axis to the cylinder optic symmetry axis.
- Inventors:
-
- P.O. Box 385, Upton, NY 11973
- Hefei Synchrotron Radiation Laboratory, University of Science and, Hefei, Anhui, CN
- Issue Date:
- Research Org.:
- Associated Universities, Inc., Upton, NY (United States)
- OSTI Identifier:
- 867195
- Patent Number(s):
- 4884697
- Assignee:
- Takacs, Peter Z. (P.O. Box 385, Upton, NY 11973);Qian, Shi-Nan (Hefei Synchrotron Radiation Laboratory, University of Science and, Hefei, Anhui, CN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- surface; profiling; interferometer; design; long-trace; profiler; non-contact; measurement; profile; slope; error; curvature; cylindrical; synchrotron; radiation; sr; mirrors; optical; based; concept; pencil-beam; inherent; depth-of-field; key; feature; zero-path-difference; beam; splitter; separates; laser; colinear; variable-separation; probe; beams; linear; array; detector; record; interference; fringe; image; analysis; location; function; scan; position; allows; reconstruct; head; mounted; air; bearing; slide; capability; measure; aspheric; optics; typical; encountered; applications; novel; transverse; outrigger; provides; information; relative; alignment; axis; cylinder; optic; symmetry; air bearing; surface profile; linear array; probe beam; beam splitter; laser beam; provides information; synchrotron radiation; surface profiler; surface profiling; aspheric optics; array detector; interference fringe; ray detector; non-contact measurement; slope error; key feature; /356/
Citation Formats
Takacs, Peter Z, and Qian, Shi-Nan. Surface profiling interferometer. United States: N. p., 1989.
Web.
Takacs, Peter Z, & Qian, Shi-Nan. Surface profiling interferometer. United States.
Takacs, Peter Z, and Qian, Shi-Nan. Sun .
"Surface profiling interferometer". United States. https://www.osti.gov/servlets/purl/867195.
@article{osti_867195,
title = {Surface profiling interferometer},
author = {Takacs, Peter Z and Qian, Shi-Nan},
abstractNote = {The design of a long-trace surface profiler for the non-contact measurement of surface profile, slope error and curvature on cylindrical synchrotron radiation (SR) mirrors. The optical system is based upon the concept of a pencil-beam interferometer with an inherent large depth-of-field. The key feature of the optical system is the zero-path-difference beam splitter, which separates the laser beam into two colinear, variable-separation probe beams. A linear array detector is used to record the interference fringe in the image, and analysis of the fringe location as a function of scan position allows one to reconstruct the surface profile. The optical head is mounted on an air bearing slide with the capability to measure long aspheric optics, typical of those encountered in SR applications. A novel feature of the optical system is the use of a transverse "outrigger" beam which provides information on the relative alignment of the scan axis to the cylinder optic symmetry axis.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1989},
month = {Sun Jan 01 00:00:00 EST 1989}
}