Multi-chamber deposition system
Abstract
A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.
- Inventors:
-
- Roseville, MN
- Shoreview, MN
- Cottage Grove, MN
- Issue Date:
- OSTI Identifier:
- 867017
- Patent Number(s):
- 4841908
- Application Number:
- 07/156,548
- Assignee:
- Minnesota Mining and Manufacturing Company (St. Paul, MN)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- ZB-4-03056-2
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- multi-chamber; deposition; simultaneous; coatings; web; volume; vacuum; chamber; disclosed; provided; plurality; chambers; layers; deposited; film; moves; supply; roll; finished; take-up; coated; separate; seals; minimize; diffusion; dopant; gas; adjacent; deposition chambers; deposition chamber; vacuum chamber; volume vacuum; supply roll; multi-chamber deposition; simultaneous deposition; take-up roll; chamber deposition; dopant gas; /118/136/
Citation Formats
Jacobson, Richard L, Jeffrey, Frank R, and Westerberg, Roger K. Multi-chamber deposition system. United States: N. p., 1989.
Web.
Jacobson, Richard L, Jeffrey, Frank R, & Westerberg, Roger K. Multi-chamber deposition system. United States.
Jacobson, Richard L, Jeffrey, Frank R, and Westerberg, Roger K. Tue .
"Multi-chamber deposition system". United States. https://www.osti.gov/servlets/purl/867017.
@article{osti_867017,
title = {Multi-chamber deposition system},
author = {Jacobson, Richard L and Jeffrey, Frank R and Westerberg, Roger K},
abstractNote = {A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 27 00:00:00 EDT 1989},
month = {Tue Jun 27 00:00:00 EDT 1989}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.