High power linear pulsed beam annealer
Abstract
A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches themore »
- Inventors:
-
- Concord, CA
- Berkeley, CA
- Sunnyvale, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 864481
- Patent Number(s):
- 4371774
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- power; linear; pulsed; beam; annealer; electron; produced; comprised; gun; heated; cathode; control; grid; focus; curved; drift; tube; maintained; positive; voltage; respect; accelerate; electrons; passing; eliminate; space; charge; coil; surrounding; provides; magnetic; field; maintains; focused; axis; imparts; motion; spiral; path; shallow; penetration; target; curvature; selected; line; sight; holder; positioned; spaced; coaxially; reference; decelerates; compresses; adjusted; position; section; matches; power pulsed; power pulse; power line; magnetic field; electron beam; electron gun; drift tube; reference voltage; space charge; pulsed electron; accelerate electrons; pulsed beam; electrons passing; beam focus; linear pulse; positive voltage; electrons pass; /219/250/313/315/
Citation Formats
Strathman, Michael D, Sadana, Devendra K, and True, Richard B. High power linear pulsed beam annealer. United States: N. p., 1983.
Web.
Strathman, Michael D, Sadana, Devendra K, & True, Richard B. High power linear pulsed beam annealer. United States.
Strathman, Michael D, Sadana, Devendra K, and True, Richard B. Sat .
"High power linear pulsed beam annealer". United States. https://www.osti.gov/servlets/purl/864481.
@article{osti_864481,
title = {High power linear pulsed beam annealer},
author = {Strathman, Michael D and Sadana, Devendra K and True, Richard B},
abstractNote = {A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches the area of the target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1983},
month = {Sat Jan 01 00:00:00 EST 1983}
}