Method for fabricating thin films of pyrolytic carbon

Brassell, Gilbert W; Weber, Gary W

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Title: Method for fabricating thin films of pyrolytic carbon

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Abstract

The present invention relates to a method for fabricating ultra-thin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the polymeric resin coating with thermally induced forces.

Inventors:

Brassell, Gilbert W ^[1]; Lewis, Jr., John ^[2]; Weber, Gary W ^[3]

Lenoir City, TN
(Oak Ridge, TN)
Amherst, NY

Issue Date:: Fri Jan 01 00:00:00 EST 1982

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

OSTI Identifier:: 864228

Patent Number(s):: 4332751

Assignee:: United States of America as represented by United States (Washington, DC)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B29 - WORKING OF PLASTICS B29C - SHAPING OR JOINING OF PLASTICS

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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B - PERFORMING OPERATIONS B29 - WORKING OF PLASTICS B29C - SHAPING OR JOINING OF PLASTICS
B29C61/00 - Shaping by liberation of internal stresses
B29C61/02 - Thermal shrinking

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/01 - on temporary substrates, e.g. substrates subsequently removed by etching

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DOE Contract Number:: W-7405-ENG-26

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: method; fabricating; films; pyrolytic; carbon; relates; ultra-thin; vapor; deposited; concave; surface; heated; substrate; total; uniform; thickness; range; micrometer; film; provided; layer; adherent; polymeric; resin; resulting; composite; easily; separated; shrinking; coating; thermally; induced; forces; resulting composite; polymeric resin; thermally induced; pyrolytic carbon; vapor deposited; uniform thickness; carbon film; heated substrate; concave surface; easily separated; composite film; ultra-thin films; /264/

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                    Brassell, Gilbert W, Lewis, Jr., John, and Weber, Gary W. Method for fabricating thin films of pyrolytic carbon.  United States: N. p., 1982. 
        Web.

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                    Brassell, Gilbert W, Lewis, Jr., John, & Weber, Gary W. Method for fabricating thin films of pyrolytic carbon.  United States.

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                    Brassell, Gilbert W, Lewis, Jr., John, and Weber, Gary W. Fri .  
        "Method for fabricating thin films of pyrolytic carbon".  United States.  https://www.osti.gov/servlets/purl/864228.

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@article{osti_864228,

  title        = {Method for fabricating thin films of pyrolytic carbon},

  author       = {Brassell, Gilbert W and Lewis, Jr., John and Weber, Gary W},

  abstractNote = {The present invention relates to a method for fabricating ultra-thin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the polymeric resin coating with thermally induced forces.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Fri Jan 01 00:00:00 EST 1982},

  month        = {Fri Jan 01 00:00:00 EST 1982}

}

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