Sputter coating of microspherical substrates by levitation
Abstract
Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.
- Inventors:
-
- Tempe, AZ
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 864054
- Patent Number(s):
- 4302311
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- sputter; coating; microspherical; substrates; levitation; microspheres; substantially; uniformly; coated; metals; nonmetals; simultaneously; levitating; total; chamber; pressures; torr; collimated; structure; 12; comprising; parallel; array; upwardly; projecting; individual; gas; outlets; 16; machined; form; dimple; 11; glass; microballoons; particularly; useful; laser; fusion; applications; method; apparatus; uniformly coated; coating method; individual gas; substantially uniformly; gas outlet; particularly useful; substantially uniform; laser fusion; sputter coating; parallel array; chamber pressure; fusion applications; /204/428/
Citation Formats
Lowe, Arthur T, and Hosford, Charles D. Sputter coating of microspherical substrates by levitation. United States: N. p., 1981.
Web.
Lowe, Arthur T, & Hosford, Charles D. Sputter coating of microspherical substrates by levitation. United States.
Lowe, Arthur T, and Hosford, Charles D. Thu .
"Sputter coating of microspherical substrates by levitation". United States. https://www.osti.gov/servlets/purl/864054.
@article{osti_864054,
title = {Sputter coating of microspherical substrates by levitation},
author = {Lowe, Arthur T and Hosford, Charles D},
abstractNote = {Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 1981},
month = {Thu Jan 01 00:00:00 EST 1981}
}
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