Method of chemical vapor deposition of boron nitride using polymeric cyanoborane
Abstract
Polymeric cyanoborane is volatilized, decomposed by thermal or microwave plasma energy, and deposited on a substrate as an amorphous film containing boron, nitrogen and carbon. Residual carbon present in the film is removed by ammonia treatment at an increased temperature, producing an adherent, essentially stoichiometric boron nitride film. 11 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7198508
- Patent Number(s):
- 5320878
- Application Number:
- PPN: US 7-819688
- Assignee:
- Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10 Jan 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; BORON NITRIDES; CHEMICAL VAPOR DEPOSITION; AMORPHOUS STATE; CHEMICAL COMPOSITION; DECOMPOSITION; BORON COMPOUNDS; CHEMICAL COATING; CHEMICAL REACTIONS; DEPOSITION; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SURFACE COATING; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication
Citation Formats
Maya, L. Method of chemical vapor deposition of boron nitride using polymeric cyanoborane. United States: N. p., 1994.
Web.
Maya, L. Method of chemical vapor deposition of boron nitride using polymeric cyanoborane. United States.
Maya, L. Tue .
"Method of chemical vapor deposition of boron nitride using polymeric cyanoborane". United States.
@article{osti_7198508,
title = {Method of chemical vapor deposition of boron nitride using polymeric cyanoborane},
author = {Maya, L},
abstractNote = {Polymeric cyanoborane is volatilized, decomposed by thermal or microwave plasma energy, and deposited on a substrate as an amorphous film containing boron, nitrogen and carbon. Residual carbon present in the film is removed by ammonia treatment at an increased temperature, producing an adherent, essentially stoichiometric boron nitride film. 11 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 14 00:00:00 EDT 1994},
month = {Tue Jun 14 00:00:00 EDT 1994}
}
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