Method of sputter etching a surface
Abstract
The surface of a target is textured by co-sputter etching the target surface with a seed material adjacent thereto, while the target surface is maintained at a pre-selected temperature. By pre-selecting the temperature of the surface while sputter etching, it is possible to predetermine the reflectance properties of the etched surface. The surface may be textured to absorb sunlight efficiently and have minimal emittance in the infrared region so as to be well-suited for use as a solar absorber for photothermal energy conversion. 4 figs.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 7157408
- Patent Number(s):
- 4431499
- Application Number:
- PPN: US 6-352738
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- AC06-76RL01830
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 26 Feb 1982
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY; SOLAR ABSORBERS; ETCHING; MATERIALS; SOLAR THERMAL CONVERSION; TEMPERATURE CONTROL; CONTROL; CONVERSION; ENERGY CONVERSION; EQUIPMENT; SOLAR ENERGY CONVERSION; SOLAR EQUIPMENT; SURFACE FINISHING; 140700* - Solar Thermal Power Systems; 140900 - Solar Thermal Utilization
Citation Formats
Henager, Jr, C H. Method of sputter etching a surface. United States: N. p., 1984.
Web.
Henager, Jr, C H. Method of sputter etching a surface. United States.
Henager, Jr, C H. Tue .
"Method of sputter etching a surface". United States.
@article{osti_7157408,
title = {Method of sputter etching a surface},
author = {Henager, Jr, C H},
abstractNote = {The surface of a target is textured by co-sputter etching the target surface with a seed material adjacent thereto, while the target surface is maintained at a pre-selected temperature. By pre-selecting the temperature of the surface while sputter etching, it is possible to predetermine the reflectance properties of the etched surface. The surface may be textured to absorb sunlight efficiently and have minimal emittance in the infrared region so as to be well-suited for use as a solar absorber for photothermal energy conversion. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 14 00:00:00 EST 1984},
month = {Tue Feb 14 00:00:00 EST 1984}
}
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