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Title: Detector and energy analyzer for energetic-hydrogen in beams and plasmas

Abstract

A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicon-dioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies. 4 figs.

Inventors:
; ;
Issue Date:
OSTI Identifier:
7068106
Patent Number(s):
4782302
Application Number:
PPN: US 6-925590
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Patent File Date: 31 Oct 1986
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; BEAM ANALYZERS; HYDROGEN; DETECTION; HYDROGEN ISOTOPES; PLASMA DIAGNOSTICS; SCHOTTKY BARRIER DIODES; SENSITIVITY; VACUUM SYSTEMS; ELEMENTS; ISOTOPES; NONMETALS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES; 430300* - Particle Accelerators- Auxiliaries & Components; 700320 - Plasma Diagnostic Techniques & Instrumentation- (1992-)

Citation Formats

Bastasz, R J, Hughes, R C, and Wampler, W R. Detector and energy analyzer for energetic-hydrogen in beams and plasmas. United States: N. p., 1988. Web.
Bastasz, R J, Hughes, R C, & Wampler, W R. Detector and energy analyzer for energetic-hydrogen in beams and plasmas. United States.
Bastasz, R J, Hughes, R C, and Wampler, W R. Tue . "Detector and energy analyzer for energetic-hydrogen in beams and plasmas". United States.
@article{osti_7068106,
title = {Detector and energy analyzer for energetic-hydrogen in beams and plasmas},
author = {Bastasz, R J and Hughes, R C and Wampler, W R},
abstractNote = {A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicon-dioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies. 4 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 01 00:00:00 EST 1988},
month = {Tue Nov 01 00:00:00 EST 1988}
}

Patent:
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