Hot hollow cathode gun assembly
Abstract
A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6900101
- Application Number:
- ON: DE84014312
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC04-76DP03533
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; HOLLOW CATHODES; DESIGN; CYLINDRICAL CONFIGURATION; HEAT SINKS; MAGNETIC FIELDS; MECHANICAL STRUCTURES; PLASMA; CATHODES; CONFIGURATION; ELECTRODES; SINKS; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Zeren, J D. Hot hollow cathode gun assembly. United States: N. p., 1983.
Web.
Zeren, J D. Hot hollow cathode gun assembly. United States.
Zeren, J D. Tue .
"Hot hollow cathode gun assembly". United States.
@article{osti_6900101,
title = {Hot hollow cathode gun assembly},
author = {Zeren, J D},
abstractNote = {A hot hollow cathode deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, the hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 22 00:00:00 EST 1983},
month = {Tue Nov 22 00:00:00 EST 1983}
}
Search for the full text at the U.S. Patent and Trademark Office
Note: You will be redirected to the USPTO site, which may require a pop-up blocker to be deactivated to view the patent. If so, you will need to manually turn off your browser's pop-up blocker, typically found within the browser settings. (See DOE Patents FAQs for more information.)
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.