Source replenishment device for vacuum deposition
Abstract
A material source replenishment device for use with a vacuum deposition apparatus is described. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- OSTI Identifier:
- 6761569
- Application Number:
- ON: DE87007248
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; VACUUM COATING; VACUUM SYSTEMS; SAMPLE CHANGERS; FILAMENTS; MECHANICAL TRANSMISSIONS; SURFACE COATING; THIN FILMS; VAPOR DEPOSITED COATINGS; COATINGS; DEPOSITION; FILMS; MACHINE PARTS; 420200* - Engineering- Facilities, Equipment, & Techniques
Citation Formats
Hill, R A. Source replenishment device for vacuum deposition. United States: N. p., 1986.
Web.
Hill, R A. Source replenishment device for vacuum deposition. United States.
Hill, R A. Thu .
"Source replenishment device for vacuum deposition". United States.
@article{osti_6761569,
title = {Source replenishment device for vacuum deposition},
author = {Hill, R A},
abstractNote = {A material source replenishment device for use with a vacuum deposition apparatus is described. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu May 15 00:00:00 EDT 1986},
month = {Thu May 15 00:00:00 EDT 1986}
}