Method and apparatus for laser/plasma chemical processing of substrates
Abstract
A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- OSTI Identifier:
- 6759913
- Application Number:
- ON: DE87007260
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; SUBSTRATES; SURFACE TREATMENTS; LASER RADIATION; ALUMINIUM; DEPOSITION; EPITAXY; ETCHING; GALLIUM ARSENIDES; IRRADIATION; SILANES; TUNGSTEN; ARSENIC COMPOUNDS; ARSENIDES; ELECTROMAGNETIC RADIATION; ELEMENTS; GALLIUM COMPOUNDS; HYDRIDES; HYDROGEN COMPOUNDS; METALS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; PNICTIDES; RADIATIONS; SILICON COMPOUNDS; SURFACE FINISHING; TRANSITION ELEMENTS; 420800* - Engineering- Electronic Circuits & Devices- (-1989)
Citation Formats
Gee, J M, and Hargis, Jr, P J. Method and apparatus for laser/plasma chemical processing of substrates. United States: N. p., 1984.
Web.
Gee, J M, & Hargis, Jr, P J. Method and apparatus for laser/plasma chemical processing of substrates. United States.
Gee, J M, and Hargis, Jr, P J. Sat .
"Method and apparatus for laser/plasma chemical processing of substrates". United States.
@article{osti_6759913,
title = {Method and apparatus for laser/plasma chemical processing of substrates},
author = {Gee, J M and Hargis, Jr, P J},
abstractNote = {A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jul 21 00:00:00 EDT 1984},
month = {Sat Jul 21 00:00:00 EDT 1984}
}
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