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Title: Solid source MOCVD system

Abstract

A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metallorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition. 13 figs.

Inventors:
;
Issue Date:
Research Org.:
Univ. of California (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
675867
Patent Number(s):
5820678
Application Number:
PAN: 8-865,827
Assignee:
Univ. of California, Los Alamos, NM (United States)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 13 Oct 1998
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL VAPOR DEPOSITION; OXIDES; PRECURSOR; CHEMICAL REACTORS; FABRICATION; HIGH-TC SUPERCONDUCTORS

Citation Formats

Hubert, B N, and Wu, X D. Solid source MOCVD system. United States: N. p., 1998. Web.
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Hubert, B N, & Wu, X D. Solid source MOCVD system. United States.
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Hubert, B N, and Wu, X D. Tue . "Solid source MOCVD system". United States.
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@article{osti_675867,
title = {Solid source MOCVD system},
author = {Hubert, B N and Wu, X D},
abstractNote = {A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metallorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition. 13 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 13 00:00:00 EDT 1998},
month = {Tue Oct 13 00:00:00 EDT 1998}
}
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