Transverse-structure electrostatic charged particle beam lens
Abstract
Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility. 7 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 675862
- Patent Number(s):
- 5821543
- Application Number:
- PAN: 8-906,303; TRN: 99:001154
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 13 Oct 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 43 PARTICLE ACCELERATORS; ELECTROSTATIC LENSES; PARTICLE BEAMS; DESIGN; GEOMETRICAL ABERRATIONS; BEAM OPTICS
Citation Formats
Moran, M J. Transverse-structure electrostatic charged particle beam lens. United States: N. p., 1998.
Web.
Moran, M J. Transverse-structure electrostatic charged particle beam lens. United States.
Moran, M J. Tue .
"Transverse-structure electrostatic charged particle beam lens". United States.
@article{osti_675862,
title = {Transverse-structure electrostatic charged particle beam lens},
author = {Moran, M J},
abstractNote = {Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility. 7 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 13 00:00:00 EDT 1998},
month = {Tue Oct 13 00:00:00 EDT 1998}
}
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