Coherence delay augmented laser beam homogenizer
Abstract
The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6291197
- Patent Number(s):
- 5224200
- Application Number:
- PPN: US 7-799524
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 27 Nov 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; LASER RADIATION; BEAM SHAPING; MICROELECTRONIC CIRCUITS; MASKING; APERTURES; COHERENT RADIATION; DESIGN; ETCHING; OPTICAL SYSTEMS; SPATIAL DISTRIBUTION; USES; DISTRIBUTION; ELECTROMAGNETIC RADIATION; ELECTRONIC CIRCUITS; OPENINGS; RADIATIONS; SURFACE FINISHING; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)
Citation Formats
Rasmussen, P, and Bernhardt, A. Coherence delay augmented laser beam homogenizer. United States: N. p., 1993.
Web.
Rasmussen, P, & Bernhardt, A. Coherence delay augmented laser beam homogenizer. United States.
Rasmussen, P, and Bernhardt, A. Tue .
"Coherence delay augmented laser beam homogenizer". United States.
@article{osti_6291197,
title = {Coherence delay augmented laser beam homogenizer},
author = {Rasmussen, P and Bernhardt, A},
abstractNote = {The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 29 00:00:00 EDT 1993},
month = {Tue Jun 29 00:00:00 EDT 1993}
}
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