Micro-machined resonator
Abstract
A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6229667
- Patent Number(s):
- 5198716
- Application Number:
- PPN: US 7-803815
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 9 Dec 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; RESONATORS; DESIGN; BONDING; ELECTRODES; ETCHING; QUARTZ; SEALS; SPRINGS; SUPPORTS; TRANSDUCERS; ELECTRONIC EQUIPMENT; EQUIPMENT; FABRICATION; JOINING; MACHINE PARTS; MECHANICAL STRUCTURES; MINERALS; OXIDE MINERALS; SURFACE FINISHING; 426000* - Engineering- Components, Electron Devices & Circuits- (1990-)
Citation Formats
Godshall, N A, Koehler, D R, Liang, A Y, and Smith, B K. Micro-machined resonator. United States: N. p., 1993.
Web.
Godshall, N A, Koehler, D R, Liang, A Y, & Smith, B K. Micro-machined resonator. United States.
Godshall, N A, Koehler, D R, Liang, A Y, and Smith, B K. Tue .
"Micro-machined resonator". United States.
@article{osti_6229667,
title = {Micro-machined resonator},
author = {Godshall, N A and Koehler, D R and Liang, A Y and Smith, B K},
abstractNote = {A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 30 00:00:00 EST 1993},
month = {Tue Mar 30 00:00:00 EST 1993}
}