Liquid injection plasma deposition method and apparatus
Abstract
A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube. 8 figs.
- Inventors:
- Issue Date:
- Sponsoring Org.:
- USDOE; USDOE, Washington, DC (United States)
- OSTI Identifier:
- 6201370
- Patent Number(s):
- 5906757
- Application Number:
- PPN: US 8-533886
- Assignee:
- Lockheed Martin Idaho Technologies Co., Idaho Falls, ID (United States)
- DOE Contract Number:
- AC07-94ID13223
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 26 Sep 1995
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; DESIGN; MATERIALS; PLASMA CONFINEMENT; PLASMA JETS; SUBSTRATES; SURFACE COATING; CONFINEMENT; DEPOSITION; 360101* - Metals & Alloys- Preparation & Fabrication; 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360601 - Other Materials- Preparation & Manufacture
Citation Formats
Kong, P C, and Watkins, A D. Liquid injection plasma deposition method and apparatus. United States: N. p., 1999.
Web.
Kong, P C, & Watkins, A D. Liquid injection plasma deposition method and apparatus. United States.
Kong, P C, and Watkins, A D. Tue .
"Liquid injection plasma deposition method and apparatus". United States.
@article{osti_6201370,
title = {Liquid injection plasma deposition method and apparatus},
author = {Kong, P C and Watkins, A D},
abstractNote = {A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 25 00:00:00 EDT 1999},
month = {Tue May 25 00:00:00 EDT 1999}
}