Reflective optical imaging system for extreme ultraviolet wavelengths
Abstract
A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 [mu]m, and preferably less than 100 [mu]m. An image resolution of features less than 0.05-0.1 [mu]m, is obtained over a large area field; i.e., 25.4 mm [times] 25.4 mm, with a distortion less than 0.1 of the resolution over the image field.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6036338
- Patent Number(s):
- 5212588
- Application Number:
- PPN: US 7-682780
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 9 Apr 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; OPTICAL SYSTEMS; DESIGN; EXTREME ULTRAVIOLET RADIATION; IMAGES; MIRRORS; REFLECTION; SPATIAL RESOLUTION; ELECTROMAGNETIC RADIATION; RADIATIONS; RESOLUTION; ULTRAVIOLET RADIATION; 440800* - Miscellaneous Instrumentation- (1990-)
Citation Formats
Viswanathan, V K, and Newnam, B E. Reflective optical imaging system for extreme ultraviolet wavelengths. United States: N. p., 1993.
Web.
Viswanathan, V K, & Newnam, B E. Reflective optical imaging system for extreme ultraviolet wavelengths. United States.
Viswanathan, V K, and Newnam, B E. Tue .
"Reflective optical imaging system for extreme ultraviolet wavelengths". United States.
@article{osti_6036338,
title = {Reflective optical imaging system for extreme ultraviolet wavelengths},
author = {Viswanathan, V K and Newnam, B E},
abstractNote = {A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 [mu]m, and preferably less than 100 [mu]m. An image resolution of features less than 0.05-0.1 [mu]m, is obtained over a large area field; i.e., 25.4 mm [times] 25.4 mm, with a distortion less than 0.1 of the resolution over the image field.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 18 00:00:00 EDT 1993},
month = {Tue May 18 00:00:00 EDT 1993}
}
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