Layered ultra-thin coherent structures used as electrical resistors having low-temperature coefficient of resistivity
Abstract
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 5992491
- Application Number:
- ON: DE83013148
- Assignee:
- EDB-83-124526
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; RESISTORS; DESIGN; TEMPERATURE DEPENDENCE; ELECTRIC CONDUCTIVITY; LAYERS; SUPERLATTICES; THIN FILMS; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; EQUIPMENT; FILMS; PHYSICAL PROPERTIES; 420800* - Engineering- Electronic Circuits & Devices- (-1989)
Citation Formats
Werner, T R, Falco, C M, and Schuller, I K. Layered ultra-thin coherent structures used as electrical resistors having low-temperature coefficient of resistivity. United States: N. p., 1982.
Web.
Werner, T R, Falco, C M, & Schuller, I K. Layered ultra-thin coherent structures used as electrical resistors having low-temperature coefficient of resistivity. United States.
Werner, T R, Falco, C M, and Schuller, I K. Tue .
"Layered ultra-thin coherent structures used as electrical resistors having low-temperature coefficient of resistivity". United States.
@article{osti_5992491,
title = {Layered ultra-thin coherent structures used as electrical resistors having low-temperature coefficient of resistivity},
author = {Werner, T R and Falco, C M and Schuller, I K},
abstractNote = {A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 31 00:00:00 EDT 1982},
month = {Tue Aug 31 00:00:00 EDT 1982}
}
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