Method of fabricating boron containing coatings
Abstract
Hard coatings are fabricated from boron nitride, cubic boron nitride, and multilayer boron/cubic boron nitride, and the fabrication thereof involves magnetron sputtering in a selected atmosphere. These hard coatings may be applied to tools and engine and other parts, as well to reduce wear on tribological surfaces and electronic devices. These boron coatings contain no morphological growth features. For example, the boron is formed in an inert (e.g. argon) atmosphere, while the cubic boron nitride is formed in a reactive (e.g. nitrogen) atmosphere. The multilayer boron/cubic boron nitride, is produced by depositing alternate layers of boron and cubic boron nitride, with the alternate layers having a thickness of 1 nanometer to 1 micrometer, and at least the interfaces of the layers may be discrete or of a blended or graded composition. 3 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 350338
- Patent Number(s):
- 5897751
- Application Number:
- PAN: 8-730,054
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 27 Apr 1999
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; BORON NITRIDES; PROTECTIVE COATINGS; COMPOSITE MATERIALS; BORON; LAYERS; USES; FABRICATION; MORPHOLOGY
Citation Formats
Makowiecki, D M, and Jankowski, A F. Method of fabricating boron containing coatings. United States: N. p., 1999.
Web.
Makowiecki, D M, & Jankowski, A F. Method of fabricating boron containing coatings. United States.
Makowiecki, D M, and Jankowski, A F. Tue .
"Method of fabricating boron containing coatings". United States.
@article{osti_350338,
title = {Method of fabricating boron containing coatings},
author = {Makowiecki, D M and Jankowski, A F},
abstractNote = {Hard coatings are fabricated from boron nitride, cubic boron nitride, and multilayer boron/cubic boron nitride, and the fabrication thereof involves magnetron sputtering in a selected atmosphere. These hard coatings may be applied to tools and engine and other parts, as well to reduce wear on tribological surfaces and electronic devices. These boron coatings contain no morphological growth features. For example, the boron is formed in an inert (e.g. argon) atmosphere, while the cubic boron nitride is formed in a reactive (e.g. nitrogen) atmosphere. The multilayer boron/cubic boron nitride, is produced by depositing alternate layers of boron and cubic boron nitride, with the alternate layers having a thickness of 1 nanometer to 1 micrometer, and at least the interfaces of the layers may be discrete or of a blended or graded composition. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 27 00:00:00 EDT 1999},
month = {Tue Apr 27 00:00:00 EDT 1999}
}